Structural features:
·Specially designed for critical process technology of special gas
·The panel style overall structure is easy to install
·The main body is made of 316L stainless steel material, which is more suitable for the use of special gases in semiconductor processes
·Metal diaphragm pressure reducing structure
·Hard sealed structure to avoid material aging and pollution
·Adopting diaphragm valve control, the flow channel is simple, the operation is reliable, and the service life is long
·The valve group is connected to the VCR structure through welding, greatly avoiding leakage.
·An alarm signal pressure gauge structure can be selected to provide an alarm signal for gas supply under pressure
·Special gas series pressure reducer
·Equipped with safety valve
·Imported pressure reducing valves and pipelines undergo pressure and leakage tests
·2 "stainless steel pressure gauge with clear reading
·All diaphragm valve knobs are equipped with an "open/close" indicator window